Request for Molybdenum etch in pquest

Colby Bellew colby.bellew at sri.com
Wed Feb 8 10:20:25 PST 2006


I have some samples that have sputtered molybdenum on oxide.  I would 
like to try etching the molybdenum in the pquest with chlorine etch 
chemistries.

Colby

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Colby Bellew, PhD
Research Engineer - MEMS
SRI International
Menlo Park, CA 94025
650-859-2647 (Phone)
650-859-3090 (fax)
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