Request for Molybdenum etch in pquest

Jim McVittie mcvittie at snf.stanford.edu
Wed Feb 8 11:56:38 PST 2006


Colby,

Why can't you etch your moly in Drytek4 with a F based chemistry?    Jim

Colby Bellew wrote:

> I have some samples that have sputtered molybdenum on oxide.  I would
> like to try etching the molybdenum in the pquest with chlorine etch
> chemistries.
>
> Colby
>
> --
> *********************************
> Colby Bellew, PhD
> Research Engineer - MEMS
> SRI International
> Menlo Park, CA 94025
> 650-859-2647 (Phone)
> 650-859-3090 (fax)
> *********************************




More information about the specmat mailing list