Request for Molybdenum etch in pquest

[Jim McVittie]

Colby,

Why can't you etch your moly in Drytek4 with a F based chemistry?    Jim

Colby Bellew wrote:

> I have some samples that have sputtered molybdenum on oxide.  I would
> like to try etching the molybdenum in the pquest with chlorine etch
> chemistries.
>
> Colby
>
> --
> *********************************
> Colby Bellew, PhD
> Research Engineer - MEMS
> SRI International
> Menlo Park, CA 94025
> 650-859-2647 (Phone)
> 650-859-3090 (fax)
> *********************************