A question about using graphite carbon in Metalica or Innotec

Seoung-Jai Bai luscious at stanford.edu
Thu Feb 9 10:22:18 PST 2006


To whom it may concern,

 This is Seoung-Jai Bai (Coral : seoung), a graduate student in Prof. Prinz
group in Mechanical engineering.

For my research, I want to deposit carbon on top of silicon nitride layer
using either Metalica or Innotec and
found that carbon is not allowd to be used in those two equipments. Jeannie
Perez told me to consult this issue 
with Specmat. So please read the attached documents and contact me if you
have any question.
Thank you!!

sj
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