Request for Molybdenum etch in pquest

Colby Bellew colby.bellew at sri.com
Thu Feb 9 10:25:21 PST 2006


Jim,

I have tried that and have not had favorable results.  I have etched the 
moly with SF6 and the problem is the residual moly disulfide that is 
left on the sidewalls.  I have tried CF4 and C2F6 and the etch is 
preferential along grain boundaries which leaves very rough sidewalls.

Colby

Jim McVittie wrote:

>Colby,
>
>Why can't you etch your moly in Drytek4 with a F based chemistry?    Jim
>
>Colby Bellew wrote:
>
>  
>
>>I have some samples that have sputtered molybdenum on oxide.  I would
>>like to try etching the molybdenum in the pquest with chlorine etch
>>chemistries.
>>
>>Colby
>>
>>--
>>*********************************
>>Colby Bellew, PhD
>>Research Engineer - MEMS
>>SRI International
>>Menlo Park, CA 94025
>>650-859-2647 (Phone)
>>650-859-3090 (fax)
>>*********************************
>>    
>>
>
>  
>

-------------- next part --------------
An HTML attachment was scrubbed...
URL: <http://snf.stanford.edu/pipermail/specmat/attachments/20060209/c5d4c055/attachment.html>


More information about the specmat mailing list