Request for Molybdenum etch in pquest

[Colby Bellew]

Jim,

I have tried that and have not had favorable results.  I have etched the 
moly with SF6 and the problem is the residual moly disulfide that is 
left on the sidewalls.  I have tried CF4 and C2F6 and the etch is 
preferential along grain boundaries which leaves very rough sidewalls.

Colby

Jim McVittie wrote:

>Colby,
>
>Why can't you etch your moly in Drytek4 with a F based chemistry?    Jim
>
>Colby Bellew wrote:
>
>  
>
>>I have some samples that have sputtered molybdenum on oxide.  I would
>>like to try etching the molybdenum in the pquest with chlorine etch
>>chemistries.
>>
>>Colby
>>
>>--
>>*********************************
>>Colby Bellew, PhD
>>Research Engineer - MEMS
>>SRI International
>>Menlo Park, CA 94025
>>650-859-2647 (Phone)
>>650-859-3090 (fax)
>>*********************************
>>    
>>
>
>  
>

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