use of Germanium in STSetch and P5000etch

Huang Kevin kevhuang at
Sat Feb 11 15:13:00 PST 2006

       Is germanium or silicon germanium allowed in stsetch and p5000etch?
Also, is there any machine in SNF that can do the equivalent of DRIE of
silicon germanium to an aspect ratio of 20?



Kevin Huang
Ph.D. Student, Peumans Group
Stanford Organic Electronics Lab
Dept. of Electrical Engineering
Email: kevhuang at
Phone: (650) 725-6924
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