GaN sputtering

Jia Feng fengj at stanford.edu
Thu Feb 23 19:06:21 PST 2006


Ed:

I regret to know the potential hazard that GaN may bring to us. I talked to Dr. Jim McVittie before I did the sputtering. Both Jim and Zheng were just so kind to help me do it. Could you please let me know how I could fix, or minimize, this problem?

Thanks,
Jia

----- Original Message ----- 
From: "Ed Myers" <edmyers at stanford.edu>
To: <fengj at stanford.edu>; <wangz at stanford.edu>
Cc: <specmat at snf.stanford.edu>; "Jeannie Perez" <jperez at snf.stanford.edu>; <nishiy at stanford.edu>
Sent: Thursday, February 23, 2006 4:39 PM
Subject: Fw: GaN sputtering


> Zheng, Jia
> 
> It appears you have ran an unauthorized process in the metalica.  I was not 
> able to find any indication of GaN in the specmat database.  This is extra 
> frustrating considering the issues we encountered last year with the 
> unauthorized use of RF depositions in the metalica.
> 
> DO NOT RUN THIS PROCESS WITHOUT SPECMAT APPROVAL.
> 
> In case you never looked at the MSDS sheet for GaN, I've enclosed the 
> health effects you have exposed your fellow users to without their knowledge.
> 
> Ed
> 
> 
> Acute Effects:
> Inhalation: May cause irritation to the nose, throat & mucous membranes.
> Ingestion: May cause nausea, vomiting and anorexia.
> Skin: May cause irritation.
> Eye: May cause irritation.
> 
> Chronic Effects:
> Inhalation: May cause depression of bone marrow function.
> Ingestion: No chronic health effects recorded.
> Skin: May cause dermatitis & depression of bone marrow function.
> Eye: No chronic health effects recorded.
> Routes of Entry: Inhalation, Skin, Eyes, Ingestion,
> Target Organs: No target organs recorded.
> 
> Carcinogenicity: None
> 
> Medical Conditions Generally Aggravated by Exposure: Pre-existing 
> respiratory disorders.
> 
> Signs and Symptoms of Exposure:
> Inhalation: May cause a red, dry throat, sneezing, coughing and difficulty 
> breathing.
> Ingestion: May cause behavioral changes such as sleepiness and loss of 
> appetite may be noted. Other symptoms may include nausea, vomiting, 
> metallic taste in mouth general itching and sweating.
> Skin: May cause redness and itching.
> Eye: May cause redness, itching and watering.
> 
> 
> 
> >X-Sieve: CMU Sieve 2.2
> >Delivered-To: Emyers at snf.stanford.edu
> >X-Mailer: QUALCOMM Windows Eudora Version 6.2.5.6
> >Date: Thu, 23 Feb 2006 15:31:13 -0800
> >To: Emyers at snf.stanford.edu
> >From: Jeannie Perez <nperez at stanford.edu>
> >Subject: Fw: GaN sputtering
> >
> >  Hi Ed,
> >Would you please read the message below and let me know if I should change 
> >parts again. I just changed them last week.
> >Jeannie
> >
> >>X-Sieve: CMU Sieve 2.2
> >>Delivered-To: jperez at snf.stanford.edu
> >>From: "Jia Feng" <fengj at stanford.edu>
> >>To: "Jeannie Perez" <jperez at snf.stanford.edu>
> >>Subject: Fw: GaN sputtering
> >>Date: Wed, 22 Feb 2006 00:32:23 -0800
> >>X-Mailer: Microsoft Outlook Express 6.00.2800.1506
> >>
> >>
> >>----- Original Message -----
> >>From: "Jia Feng" <fengj at stanford.edu>
> >>To: "Jim McVittie" <mcvittie at cis.Stanford.EDU>
> >>Sent: Wednesday, February 22, 2006 12:29 AM
> >>Subject: Re: GaN sputtering
> >>
> >>
> >> > Jim:
> >> >
> >> > Zheng helped me do the GaN sputtering with Metalica in the afternoon. 
> >> The plasma was ignited and GaN was successfully sputtered onto my 
> >> wafers. But unfortunately, the chimney was not well fastened and thus 
> >> was tilted a little bit during the sputtering. There might be some GaN 
> >> sputtered onto the bottom of the chamber and onto the anode (we can see 
> >> a blue corlor). I did the sputtering at 25 W RF power, 10 mTorr 
> >> pressure, and 30 sccm Ar flow. The time was 10 min for one dummy wafer 
> >> and 30 min for two real wafers. I am wondering if I should clean the 
> >> chamber and the anode. If so, how can I do it? Should I better have my 
> >> own dedicated anode in the future?
> >> >
> >> > Thanks,
> >> > Jia
> 
> 


More information about the specmat mailing list