GaN sputtering

Peter Griffin griffin at stanford.edu
Fri Feb 24 08:32:01 PST 2006


Jia,

Why don't you gather all the info you have on GaN sputtering from
the literature (the Florida group have done a lot of it, but there
are others) and also the Material Safety Data Sheets (MSDS) on the
TDI material you used, and also type up a proposed procedure based
on the ZnCdS sputtering that Zheng does. Then submit it to SPECMAT
and make sure you don't do any more sputtering until you hear from
them. We should also offer to get the chimney and shutter bead
blasted clean. 

Peter

> Ed:
> 
> I regret to know the potential hazard that GaN may bring to us. I talked to Dr. Jim McVittie before I did the sputtering. Both Jim and Zheng were just so kind to help me do it. Could you please let me know how I could fix, or minimize, this problem?
> 
> Thanks,
> Jia
> 
> ----- Original Message ----- 
> From: "Ed Myers" <edmyers at stanford.edu>
> To: <fengj at stanford.edu>; <wangz at stanford.edu>
> Cc: <specmat at snf.stanford.edu>; "Jeannie Perez" <jperez at snf.stanford.edu>; <nishiy at stanford.edu>
> Sent: Thursday, February 23, 2006 4:39 PM
> Subject: Fw: GaN sputtering
> 
> 
> > Zheng, Jia
> > 
> > It appears you have ran an unauthorized process in the metalica.  I was not 
> > able to find any indication of GaN in the specmat database.  This is extra 
> > frustrating considering the issues we encountered last year with the 
> > unauthorized use of RF depositions in the metalica.
> > 
> > DO NOT RUN THIS PROCESS WITHOUT SPECMAT APPROVAL.
> > 
> > In case you never looked at the MSDS sheet for GaN, I've enclosed the 
> > health effects you have exposed your fellow users to without their knowledge.
> > 
> > Ed
k




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