material
Mary Tang
mtang at stanford.edu
Fri Feb 24 16:04:53 PST 2006
Hi Mike --
As we discussed, please do send a SpecMat request, just to make sure we
close the loop on this. In my own, personal opinion, these things
should be fine -- pentacene is fine, as long as any solvents have been
removed; cured PDMS is generally fine, as long as temperatures don't get
too hot. (I'm afraid I don't know and can't say anything about Ru in
the innotec.) But other SpecMat committee members should weigh in on
this as well. Please submit a standard SpecMat request, using the
questions here as a guideline:
http://snf.stanford.edu/Materials/NewMatProc.html
Do you plan to deposit pentacene in your own lab?
Mary
Mang-Mang Ling wrote:
>Hi Jeannie:
>
> I've just talked with Dr. Mary Tang. She told me that organic
>semiconductors such is pentacene is fine for Innotech, so is cured PDMS.
>Just want to get your opionion, too. If it were OK with you, then I'll
>order Ru (7cc) as starter material, and get help from you to be trained.
>Thanks.
>
> --- Sincerely, Mike
>
>Quoting Jeannie Perez <nperez at stanford.edu>:
>
>
>
>>Hi,
>>Give me a specific name of the organic film. You can use photo resist
>>as long as it is hardbaked prior to deposition, you can use
>>polyimide tape (single sided paste) or Kapton tape ( double sided
>>paste).
>>Let me know if you have any question or just stop by my office.
>>Regards,
>>Jeannie
>>At 09:18 AM 2/24/2006, you wrote:
>>
>>
>>>Hi Jeannie:
>>>
>>>For Ru metal deposition,can we use substrates with organic
>>>semiconductor films or PDMS in the Innotec
>>>evaporator? Thanks.
>>>
>>> --- Sincerely, Mike
>>>
>>>
>>
>>
>
>
>
>
--
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu
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