[Fwd: [Phosphorosilicafilm 5e20]]

Saeroonter Oh sroonter at stanford.edu
Fri Feb 24 17:10:55 PST 2006


Hello~

Here is my process flow.
Depending on the decision of the state of the doping solution the process
can be modified to the according equipment cleanliness.
If any questions or problems, please let me know.

Thank you very much.

Sincerely,
Saeroonter


Quoting Ed Myers <edmyers at stanford.edu>:

> Saeroonter,
>
> SpecMat reviewed your request at our meeting this week.  Unfortunately,
> we
> could not come to a decision due to lack of information.  What you have
> provided us appears to be only a limited part of your process.  We feel
> there is much more processing associated with your samples than what you
> have disclosed.  Feeling that we can not protect the cleanliness of our
> equipment since we do not know which equipment will see your wafers we
> can
> not approve your request with the information provided.
>
> I have attached an example of a process flow which provide sufficient
> information for the example.  If you could take a similar approach for
> your
> process, we should be able to reach a positive decision.  If your wafers
> are following a standard CMOS clean process, we do not need to see the
> process flow prior to where you want to add the non-standard steps.  What
> is very important is to see where your samples will go, following the
> non-standard steps.
>
> Another question raised deals with the contamination or cleanliness of
> your
> doping solutions.  These materials need to be semiconductor grade, if you
> want to process in any of our clean equipment.
>
> Regards,
>
> At 12:35 PM 2/14/2006, you wrote:
> >Hello,
> >
> >Sorry for the lack of information.
> >I didn't know how much I had to provide.
> >RTA in the article is 900C for1s.
> >I'm using Si wafers and the spin-on diffusant(SOD).
> >There won't be any kind of metal on my wafer until my last step,
> >metallization.
> >There's no metal ingredients in the SOD.
> >
> >I'm asking around the staff about the RTA machines.
> >Since I do not want to use the table-top ones which are gold
> contaminated,
> >I'm consulting how to use the other two RTA machines. (which are powered
> by
> >a robot arm)
> >
> >Thank you.
> >
> >Sincerely,
> >
> >Saeroonter
> >
> >
> >
> >
> >Quoting Ed Myers <edmyers at stanford.edu>:
> >
> > > Saeroonter,
> > >
> > > Sorry for the delay, but SpecMat runs on two week cycles.  Today is
> our
> > > regularly scheduled meeting at 1:30pm.  As you learned it is
> important to
> > > make sure you provide enough information for us to make a decision at
> the
> > > next meeting.  If not there is another two week wait.
> > >
> > > I've looked over the information you provide, but it still leaves a
> lot
> > > of
> > > questions.  You have provided all the relevant information on the
> > > chemicals, but the process information is lacking.   One big factor
> is
> > > which equipment set (clean, semiclean or gold contaminate) you plan
> on
> > > using and what is the processing temperature for the RTA?  You
> provided
> > > an
> > > article, but it would be better if you called out your parameters
> instead
> > > of having us look through the article and try and deduce what you
> want
> > > (by
> > > the way, I could not get the article to open).
> > >
> > > The process flow you have provide does not appear to be complete.  I
> > > seems
> > > like you will have a patterned and etched device and you are doping
> into
> > > some opening you have created.  Once you have done your doping your
> > > process
> > > flow indicates you will be doing a wet etch and then removing the
> wafer
> > > from the fab.  Is this correct or is there other processing which is
> not
> > > shown in your request.  This matters in terms of which equipment set
> can
> > > approve for your experiment.
> > >
> > > Regards,
> > > Ed
> > >
> > >
> > >
> > > >Hello,
> > > >
> > > >1. Contact Info
> > > >Name: Saeroonter Oh
> > > >coral: sroonter
> > > >Phone: 650-353-1266
> > > >Email: sroonter at stanford.edu
> > > >PI: Prof. Philip Wong
> > > >
> > > >2. Chemical
> > > >Name: Phosphorosilicafilm 5x10(20)
> > > >Manufactured by EMULSITONE
> > > >CAS Number: 141-78-6
> > > >
> > > >MSDS:
> > > >------SECTION I - HAZARDOUS INGREDIENTS ------
> > > >
> > > >NAME                           CAS#                   NATURE OF
> HAZARD
> > > >
> > > >ETHYL ACETATE                   141-78-6              FLAMMABLE
> > > >
> > > >ETHYL ALCOHOL                    64-17-5              FLAMMABLE
> > > >
> > > >METHYL ALCOHOL                   67-56-1              FLAMMABLE
> > > >
> > > >PHOSPHORUS PENTOXIDE           1314-56-3              IRRITANT
> > > >
> > > >
> > > >------SECTION II - PHYSICAL DATA ------
> > > >
> > > >BOILING POINT: 176 DEG. F
> > > >
> > > >SPECIFIC GRAVITY: 0.88
> > > >
> > > >VAPOR PRESSURE: 50.4 MMHg (20 DEG. C)
> > > >
> > > >PERCENT VOLATILE BY VOLUME: 80%
> > > >
> > > >VAPOR DENSITY (AIR = 1): 1.66
> > > >
> > > >SOLUBILITY IN WATER: SOLUBLE
> > > >
> > > >APPEARANCE AND ODOR: CLEAR SOLUTION, ALCOHOL-VINEGAR ODOR
> > > >
> > > >
> > > >------SECTION III - HEALTH HAZARD DATA ------
> > > >
> > > >THRESHOLD LIMIT VALUES:
> > > >
> > > >ETHYL ACETATE:
> > > >OSHA STD - AIR: TWA 400 PPM (SKIN)
> > > >
> > > >ETHYL ALCOHOL:
> > > >OSHA STD - AIR: TWA 1000 PPM (SKIN)
> > > >
> > > >METHYL ALCOHOL:
> > > >OSHA STD - AIR: TWA 200 PPM
> > > >
> > > >EFFECTS OF OVEREXPOSURE:
> > > >
> > > >INHALATION:
> > > >EXPOSURE TO MORE THAN ABOVE LISTED THRESHOLD LIMIT MAY CAUSE
> HEADACHE,
> > > >DROWSINESS AND LASSITUDE, LOSS OF APPETITE, THROAT IRRITATION AND
> > > INABILITY
> > > >TO CONCENTRATE.
> > > >
> > > >INGESTION:
> > > >CAN CAUSE DEPRESSION OF CENTRAL NERVOUS SYSTEM. NAUSEA, VOMITING,
> > > DIARRHEA.
> > > >SEE EMERGENCY FIRST AID PROCEDURES BELOW FOR FURTHER INFORMATION.
> > > >
> > > >EYE CONTACT: LIQUID OR VAPOR MAY CAUSE IRRITATION.
> > > >
> > > >SKIN CONTACT:
> > > >MAY CAUSE IRRITATION AND DEFATTING OF SKIN ON PROLONGED CONTACT.
> > > >
> > > >OTHER:
> > > >INDIVIDUAL RESPONSE TO METHYL ALCOHOL VARY. INGESTION OF LESS THAN
> 30 ML
> > > HAS
> > > >BEEN FATAL TO HUMANS. IN GENERAL, A FEW OUNCES MAY CAUSE BLINDNESS
> OR
> > > DEATH.
> > > >AS LITTLE A 4 ML MAY BE TOXIC IF INGESTED.
> > > >
> > > >EMERGENCY FIRST AID PROCEDURES:
> > > >
> > > >FOR OVEREXPOSURE BY:
> > > >
> > > >SWALLOWING:
> > > >THIS PRODUCT CONTAINS METHYL ALCOHOL. IF VICTIM IF CONSCIOUS AND
> ABLE TO
> > > >SWALLOW, HAVE VICTIM DRINK WATER OR MILK TO DILUTE. NEVER GIVE
> ANYTHING
> > > BY
> > > >MOUTH IF VICTIM IS UNCONSCIOUS OR HAVING CONVULSIONS. CALL A
> PHYSICIAN
> > > OR
> > > >POISON CONTROL CENTER IMMEDIATELY. INDUCE VOMITING ONLY IF ADVISED
> BY
> > > >PHYSICIAN OR POISON CONTROL CENTER.
> > > >
> > > >INHALATION:
> > > >IMMEDIATELY REMOVE VICTIM TO FRESH AIR. IF VICTIM HAS STOPPED
> BREATHING,
> > > >GIVE ARTIFICIAL RESPIRATION, PREFERABLY MOUTH-TO-MOUTH. GET MEDICAL
> > > >ATTENTION
> > > >IMMEDIATELY.
> > > >
> > > >CONTACT WITH EYES OR SKIN:
> > > >IMMEDIATELY FLUSH AFFECTED AT LEAST 15 MINUTES. REMOVE AND CLEAN OR
> > > DISPOSE
> > > >OF CONTAMINATED CLOTHING IN ACCORDANCE WITH APPROPRIATE FEDERAL,
> STATE
> > > AND
> > > >LOCAL REGULATIONS. GET MEDICAL ATTENTION IMMEDIATELY.
> > > >
> > > >
> > > >------SECTION IV - FIRE AND EXPLOSION HAZARD DATA ------
> > > >
> > > >FLASH POINT: 131 DEG. F (OPEN CUP)
> > > >
> > > >FLAMMABLE LIMITS:
> > > >LEL: 2.2%
> > > >UEL: 10.7%
> > > >
> > > >EXTINGUISHING MEDIA:
> > > >DRY CHEMICAL, CARBON DIOXIDE, OR ALCOHOL "FOAM". WATER MAY BE
> > > INEFFECTIVE,
> > > >BUT
> > > >SHOULD BE USED TO KEEP FIRE-EXPOSED CONTAINERS AND SURFACES COOL. IF
> A
> > > LEAK
> > > >OR
> > > >SPILL HAS NOT IGNITED, USE WATER SPRAY TO DISPERSE VAPORS AND TO
> PROTECT
> > > MEN
> > > >ATTEMPTING TO STOP LEAK. WATER SPRAY MAY BE USED TO FLUSH SPILLS
> AWAY
> > > FROM
> > > >EXPOSURE AND TO DILUTE SPILLS TO NON-FLAMMABLE MIXTURES (NFPA-49
> 1975).
> > > >
> > > >SPECIAL FIREFIGHTING PROCEDURES:
> > > >FIREFIGHTERS SHOULD WEAR SELF-CONTAINED BREATHING APPARATUS IN THE
> > > POSITIVE
> > > >MODE WITH FULL FACEPIECE WHEN THERE IS A POSSIBILITY OF EXPOSURE TO
> > > SMOKE,
> > > >FUMES OR HAZARDOUS DECOMPOSITION PRODUCTS.
> > > >
> > > >
> > > >------SECTION V - REACTIVITY DATA ------
> > > >
> > > >STABILITY: STABLE
> > > >
> > > >INCOMPATIBILITY: STRONG OXIDIZERS
> > > >
> > > >HAZARDOUS DECOMPOSITION PRODUCTS:
> > > >AS WITH ALL ORGANIC SOLVENTS, COMBUSTION WILL PRODUCE CARBON
> DIOXIDE,
> > > CARBON
> > > >MONOXIDE AND WATER.
> > > >
> > > >HAZARDOUS POLYMERIZATION: WILL NOT OCCUR.
> > > >
> > > >
> > > >------SECTION VI - SPILL OR LEAK PROCEDURES ------
> > > >
> > > >IF A LEAK OR SPILL OCCURS:
> > > >WEAR APPROPRIATE PROTECTIVE CLOTHING AS DESCRIBED IN SECTION VII
> BELOW.
> > > >ELIMINATE ALL IGNITION SOURCES. SMALL SPILLS (UP TO ONE GALLON) MAY
> BE
> > > >COLLECTED WITH ABSORBENT MATERIAL. FOR LARGER UNCONTROLLED RELEASES,
> > > FLUSH
> > > >SPILL AREA WITH WATER SPRAY. PREVENT RUNOFF FROM ENTERING DRAINS,
> SEWERS
> > > AND
> > > >STREAMS. USE WATER SPRAY TO DISPERSE VAPORS. DISCARD CONTAMINATED
> > > CLOTHING
> > > >ONLY IN ACCORDANCE WITH FEDERAL, STATE AND LOCAL REGULATIONS.
> > > >
> > > >WASTE DISPOSAL METHOD:
> > > >OBSERVE ALL FEDERAL, STATE AND LOCAL LAWS REGARDING HAZARDOUS WASTE
> > > REMOVAL
> > > >AND RECYCLING.
> > > >
> > > >
> > > >------SECTION VII - SPECIAL PROTECTION INFORMATION ------
> > > >
> > > >RESPIRATORY PROTECTION:
> > > >USE APPROPRIATE NIOSH-APPROVED RESPIRATOR FOR ORGANIC VAPOR IF
> EXPOSURE
> > > IS
> > > >LIKELY TO EXCEED ACCEPTABLE LIMITS.
> > > >
> > > >VENTILATION:
> > > >GENERAL: AT LEAST 10 AIR CHANGES PER HOUR FOR GOOD GENERAL ROOM
> > > VENTILATION.
> > > >LOCAL EXHAUST: IF NEEDED TO CONTROL VAPOR.
> > > >
> > > >SKIN AND EYE PROTECTION:
> > > >SAFETY GLASSES SHOULD BE WORN IF THERE IS ANY DANGER OF SPLASHING.
> > > PERSONS
> > > >WITH SENSITIVE SKIN SHOULD WEAR GLOVES AND PROTECTIVE CLOTHING.
> > > >
> > > >
> > > >------SECTION VIII - SPECIAL PRECAUTIONS ------
> > > >
> > > >HANDLING AND STORAGE:
> > > >STORE THIS SOLUTION IN A COOL, DRY PLACE. AS WITH ANY CHEMICAL, USE
> > > >REASONABLE
> > > >CARE IN STORAGE, APPLICATION AND DISPOSAL.
> > > >
> > > >
> > > >------SECTION IX - SHIPPING REGULATIONS ------
> > > >
> > > >PROPER SHIPPING NAME: ETHANOL SOLUTION, UN1170
> > > >
> > > >IATA REGULATIONS:
> > > >
> > > >LABELS: FLAMMABLE LIQUID
> > > >
> > > >QUANTITY LIMITS                  PKG. INST.            PKG. GROUP
> > > >
> > > >PASSENGER AIRCRAFT:              309                   III
> > > >60 LITERS/PACKAGE
> > > >
> > > >CARGO AIRCRAFT:                  310                   III
> > > >220 LITERS/PACKAGE
> > > >
> > > >DOT REGULATIONS: ETHANOL SOLUTION, UN 1170
> > > >
> > > >LABELS: FLAMMABLE LIQUID
> > > >
> > > >
> > > >
> > > >3. Vendor: EMULSITONE COMPANY
> > > >Address:
> > > >19 Leslie Court
> > > >Whippany, New Jersey 07981
> > > >TEL. (973)386-0053
> > > >FAX (973)503-0256
> > > >http://emulsitone.com/
> > > >
> > > >4. Reason for request
> > > >Attatched file: 2003 paper on "Proximity Rapid Thermal Diffusion"
> (Alan
> > > >Seabaugh group)
> > > >Need abrupt shallow junctions in Si, Ge, GaAs.
> > > >
> > > >
> > > >5. Process flow
> > > >There's a source wafer and a target wafer.
> > > >
> > > >The Emulsitone phosphorosilicafilm is spin coated on a cleaned
> source
> > > wafer.
> > > >Then bake. Three cleaned spacers(wafer strips) are placed on top of
> > > source
> > > >wafer and target wafer is placed on top of the spacers facing down.
> > > >Then RTA. Then cleaned in buffered HF.
> > > >
> > > >Eventually going to make silicon pn diodes.
> > > >I'm measuring the btbt leakage in pn junctions for various
> materials(Si,
> > > >Ge..)
> > > >
> > > >- Equipment used?
> > > >Karlsuss
> > > >RTA
> > > >Drytek
> > > >wetbenches before/after doping
> > > >I don't know where to spin this on? Can I use Headway?
> > > >
> > > >6. Amount and form
> > > >4 oz
> > > >liquid form
> > > >
> > > >
> > > >7. Storage
> > > >One of the flammable cabinets after labeling.
> > > >HANDLING AND STORAGE:
> > > >STORE THIS SOLUTION IN A COOL, DRY PLACE. AS WITH ANY CHEMICAL, USE
> > > >REASONABLE CARE IN STORAGE, APPLICATION AND DISPOSAL.
> > > >
> > > >
> > > >8. Disposal
> > > >IF A LEAK OR SPILL OCCURS:
> > > >WEAR APPROPRIATE PROTECTIVE CLOTHING AS DESCRIBED IN SECTION VII
> BELOW.
> > > >ELIMINATE ALL IGNITION SOURCES. SMALL SPILLS (UP TO ONE GALLON) MAY
> BE
> > > >COLLECTED WITH ABSORBENT MATERIAL. FOR LARGER UNCONTROLLED RELEASES,
> > > FLUSH
> > > >SPILL AREA WITH WATER SPRAY. PREVENT RUNOFF FROM ENTERING DRAINS,
> SEWERS
> > > AND
> > > >STREAMS. USE WATER SPRAY TO DISPERSE VAPORS. DISCARD CONTAMINATED
> > > CLOTHING
> > > >ONLY IN ACCORDANCE WITH FEDERAL, STATE AND LOCAL REGULATIONS.
> > > >
> > > >WASTE DISPOSAL METHOD:
> > > >OBSERVE ALL FEDERAL, STATE AND LOCAL LAWS REGARDING HAZARDOUS WASTE
> > > REMOVAL
> > > >AND RECYCLING.
> > > >
> > > >Thank you,
> > > >
> > > >Saeroonter
> > > >
> > > >
> > >
> > >
> > >
>




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