request to use PDMS in P5000

Jim McVittie mcvittie at snf.stanford.edu
Tue Jan 3 13:59:21 PST 2006


Hi Alissa,

During the overetch, the Al etch chamber will be contaminated by the
decomposition products of the PDMS. So the important question what is in
PDMS and is it a problem to other users of the chamber. My concern is
what metals at in PDMS and at what level. Can you find a purity analysis
for PDMS?

    Thanks, Jim

"Alissa M. Fitzgerald" wrote:

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