Etching equipment for devices containing platinum

Mary Tang mtang at
Fri Jan 6 16:13:47 PST 2006

Hi Lizzie --

Nancy is right -- the MRC etcher could be used for physical/sputter 
etching of metals using Argon.  It would be helpful to know what films 
are on your wafers -- their order and thicknesses (is it SU8 on top of 
Pt on top of SiO2?  Does the SU8 contain the pattern to be etched into 
Pt and SiO2?)  It would also be helpful to know what kind of structure 
size you require and your device toleratnces (uniformity, sidewall 
profile, etc.)  These factors will help determine if there are etch 
tools or etching methods in our lab that could be used.



Elizabeth Ann Hager-Barnard wrote:

> Hello,
>     My name is Lizzie Hager-Barnard and I'm a first year graduate  
> student in Materials Sci. and Eng., working for Prof. Nick Melosh.   
> (My SNF username is lizhb.)  I am trying to find an appropriate  
> procedure for making trenches in my devices, which are layered  
> silicon devices.  Specifically, my devices consist of SiO2, platinum,  
> and SU-8 layers on silicon wafers.  (The trenches need to go through  
> all of these materials.)  Since my devices contain platinum, I  
> understand that they cannot be processed on any equipment classified  
> as clean or semi-clean.  This poses a problem for me, as my advisor  
> believes that a chlorine-based gas would be best for etching  
> platinum, and all etching equipment using this type of gas is  
> classified as clean or semi-clean, as far as I'm aware.
>     I spoke to Ms. Nancy Latta yesterday and she advised that I used 
> the  MRC etcher.  However she also suggested that I contact SpecMat 
> to  confirm the acceptability and effectiveness of this equipment for 
> my  device.  If you could advise me as to what etcher would be best in 
> my  situation, and let me know any steps that I need to take to make 
> sure  my procedure is acceptable, I would appreciate it.  If you have  
> further questions about my produce, please feel free to contact me.   
> I may be contacted at lizhb at or at (650)326-3844.
>     Thank you for your help,
>     Lizzie Hager-Barnard

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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