Request for Outside sample in P5000 Ch A

Eric Perozziello eap at gloworm.Stanford.EDU
Wed Jan 18 15:26:10 PST 2006


Dear Specmat

A company (WOSTEC) has requested to run a small, 1 cm square
piece in the P5000 Ch A (Metal etch).  The piece is produced outside,
but in a CMOS-type laboratory in Russia.

They have completed the TOF SIMS analysis on this sample
(attached).

The SIMS was performed on three spots on the sample.
As you'll see, two of the spots looks quite good,
and one spot (#2) looks marginal.

Had the analysis been done with TXRF, an average would be
measured over the 1cm area.  Also, the piece will only be
about 1/75th of the total wafer area.  The remainder of the
area would be a clean silicon dummy wafer (probably oxidized).

As usual, they are in a big hurry to get something, or
to find out if this is going to be possible here.

Many thanks for the consideration,
-Eric

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