[Emulsitone Co. products]

Saeroonter Oh sroonter at stanford.edu
Mon Jan 30 15:27:23 PST 2006


I have two materials from Emulsitone.
One is Phosphorosilicafilm 5e20, and the other Borofilm 100.

Both of them are used for spin-on dopants.
(By the way, is there a way to spin these things on in the fab?)

What procedure do I need to go through to bring these chemicals
into the lab?

Thank you very much,

Saeroonter Oh

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