decision on PDMS in STS?

Ed Myers edmyers at
Tue Jun 6 10:23:43 PDT 2006


SpecMat has reviewed your request to run PDMS in the STS etcher.  At 
this time, we have chosen not to make this an accepted 
practice.  Instead, PDMS in the STS will only be allowed on a 
case-by-case basis.  If you have need to run PDMS in the future, 
please inform SpecMat on each occurrence.


At 03:00 PM 5/16/2006, Alissa M. Fitzgerald wrote:
>Hi SpecMat,
>I had requested permission to use PDMS in the STS in an email during 
>the last week of April.  I know that you were going to meet on 5/9.
>Was there a final decision on my request to use PDMS in the STS?
>Please let me know, we have been awaiting some news since this is 
>important to our processing.

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