Gretchen Legaspi Chua gchua at
Fri Jun 30 13:52:38 PDT 2006

Hi Mary,

Ok I just talked to Dow Corning. It has a six part process:

1. Spin Coating - So we might need to use the headway spinner
2. Soft Bake - Oven or hotplate (we would prefer the oven)
3. UV Exposure - Karlsuss
4. Post Bake - Oven or hotplate (we would prefer the oven)
5. Developing
6. Hard Bake - Oven

This is just a general process sheet. Since its a long weekend, I couldn't
get a hold of a product specialist in Dow Corning to get a specific run
sheet (i.e. temperatures, run time, what type of developer, etc.) I'm
sending them an email, but I will not get a response back until the 5th. I
cannot tell you what is the physical state of the silicone at each stage
just yet. Sorry for the delay. However, I know we need to store it at -15C
is we are not using it and bring it to room temp when we are ready to
process it. I have a attached a spec sheet with this email. I will forward
it to you as soon as I get any response. For now, I am searching for papers
that enumerate their fab process using this silicone.

Thanks and Happy 4th of July!


Quoting Mary Tang <mtang at>:

> Hi Gretchen --
> Could you please include information about where you plan to use this
> material and how?  (i.e., which equipment and the physical state of your
> silicone at each stage, how to use it, where you'll store it, etc.)
> After looking over this stuff, it appears to be very different from the
> ordinary Sylgard 182/184 that people usually use in the lab.
> Thanks,
> Mary
> Gretchen Legaspi Chua wrote:
> >Hello,
> >
> >I'm part of the ME 342 class. We would like to ask you if we could bring
> >some photo-patternable silicone from Dow Corning into SNF. They are WL
> 5153
> >and WL 5150. I attached the MSDS sheet with this email. Let me know if
> you
> >need anything else or if you have questions.
> >
> >Thanks.
> >
> >Cheers,
> >
> >Gretchen
> >
> --
> Mary X. Tang, Ph.D.
> Stanford Nanofabrication Facility
> CIS Room 136, Mail Code 4070
> Stanford, CA  94305
> (650)723-9980
> mtang at

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