MSDS for JSR NFR 105G
mahnaz at snf.stanford.edu
Fri Jun 30 16:30:05 PDT 2006
artyjamo at comcast.net wrote:
> Hello Spec Mat,
> I would like to bring in a new negative resist, JSR NFR 105G.
> This resist is a thinner version of JSR NFR 107, which has been
> approved for use at SNF.
> I am planning on bringing the samples in in 8 oz brown bottles (like
> we have in the store room) and storing them
> in the Flammables cabinet that we have (shelf L) along with the other
> photo-resist samples. My intention is to use these resists to coat my
> 3 inch Silicon wafers on the Headway spinner (1-2 um thick) and soft
> bake the resist on the hotplates that are adjacent to the Headway.
> I am
> planning on using the Karl Seuss aligners to expose the wafers, and then
> I will develop the patterns at the develop bench in beakers using LDD-26W.
> Disposal and clean up of these materials should follow the standard
> procedures for most of the positive photoresists ( even though it is
> a negative resist ) - bagging contaminated clean room wipes, foil &
> empty bottles and putting them in the designated chemical trash
> bins. The resists themselves can be dispensed in the chemical carboys
> for organics in the solvent hoods for disposal. The used LDD-26W
> developer containing the resist will go down the drain at
> the develop bench.
> I am attaching a PDF file of the MSDS sheet for this resist.
> -Aleta Jamora
> Translucent Inc
> 510 378 1602
> artyjamo at comcast.net <mailto:artyjamo at comcast.net>
Please come by my office and get proper yellow label and bar code which
I am sure you are familiar with.
Consider this email as an approval of your process.
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