MSDS for JSR NFR 105G

Mahnaz Mansourpour mahnaz at snf.stanford.edu
Fri Jun 30 16:30:05 PDT 2006


artyjamo at comcast.net wrote:

> Hello Spec Mat,
>  
>  
>     I would like to bring in a new negative resist, JSR NFR 105G.  
> This resist is a thinner version of JSR NFR 107, which has been 
> approved for use at SNF.  
>  
>  I am planning on bringing the samples in  in 8 oz brown bottles (like 
> we have in the store room)  and storing them
> in the Flammables cabinet that we have (shelf L)   along with the other 
> photo-resist samples.   My intention is to use these resists to coat my
> 3 inch Silicon wafers on the Headway spinner   (1-2 um thick) and soft 
> bake the resist on the hotplates that are adjacent to the Headway.    
> I am 
> planning on using the Karl Seuss aligners to expose the wafers,  and then
> I will develop the patterns at the develop bench in beakers using LDD-26W.
>     Disposal and clean up of these materials should follow the standard 
> procedures for most of the positive photoresists  ( even though it is 
> a negative resist ) - bagging contaminated clean room wipes, foil & 
> empty bottles and putting them in the designated  chemical trash 
> bins.  The resists themselves can be dispensed in the chemical carboys 
> for organics in the solvent hoods for disposal.   The  used LDD-26W 
> developer containing the resist will go down the drain at 
> the develop bench.
>  
> I am attaching a PDF file of the MSDS sheet for this resist.
>  
> Thanks
>  
> -Aleta Jamora
>  
> Translucent Inc
> 510 378 1602
> artyjamo at comcast.net <mailto:artyjamo at comcast.net>

Hi Aleta

Please come by my office and get proper yellow label and bar code which 
I am sure you are familiar with.
Consider this email as an approval of your process.

mahnaz
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