[Fwd: Re: lab chemicals]

Mahnaz Mansourpour mahnaz at stanford.edu
Tue Mar 7 10:40:29 PST 2006


Mary Tang wrote:

> Hi Bo --
>
> Mahnaz forwarded your MSDS to the SpecMat committee.  Although you may 
> have spoken with Mahnaz about your use of this chemical, I don't think 
> other SpecMat members are up to speed -- and I have a question...  
> This chemical contains glycol ethers, which we would like to minimize 
> in our lab wherever possible.  Is there a reason why you need this 
> particular resist instead of, say, the SPR-220-3 or similar 
> formulations which replaced the AZ4620 in our lab?
>
> Thanks,
>
> Mary
>
> Mahnaz Mansourpour wrote:
>
>>
>>
>> -------- Original Message --------
>> Subject:     Re: lab chemicals
>> Date:     Mon, 6 Mar 2006 14:25:44 -0800
>> From:     Bo.Liu at Seagate.com <mailto:Bo.Liu at Seagate.com>
>> To:     mahnaz at stanford.edu <mailto:mahnaz at stanford.edu>
>>
>>
>>
>>
>> Mahnaz,
>> Thank you for reminding. Attached please find the MSDS for this 
>> chemical.
>>
>> Bob
>>
>>
>>
>>
>>
>> *Mahnaz Mansourpour <mahnaz at stanford.edu> <mailto:mahnaz at stanford.edu>*
>> No Phone Info Available
>>
>> 03/06/2006 02:14 PM
>>
>>     
>> To
>>     Bo.Liu at Seagate.com <mailto:Bo.Liu at Seagate.com>
>> cc
>>     
>> Subject
>>     Re: lab chemicals
>>
>>
>>
>>     
>>
>>
>>
>>
>>
>> Bo.Liu at Seagate.com <mailto:Bo.Liu at Seagate.com> wrote:
>>
>> Dear Mahnaz,
>> I have a AZ photoresist P4330-RS. It is just the same as P4620 (you 
>> mentioned that I can use it in the lab on the Headway spinner) but 
>> thinner and has a surfactant in it to reduce striations in the 
>> coat.Would you please to check and make sure that I can use it in the 
>> lab?
>> Also, we talked about the chemical cyclotene (BCB), and you need to 
>> put a yellow tag on it. I found that we have bottle with yellow tag 
>> from you. I will visit the lab tomorrow, and bring the bottle to you.
>> Roughly, I may get to the lab around 9-10AM. Will you be in office at 
>> that time?
>> Best regards,
>> Bob
>> Hello
>>
>> Well regarding the resist, you need to send me the MSDS so I can 
>> check it out and what will be the process meaning where the wafers 
>> will go after the headway.
>>
>> I will in the office tomorrow if not in the office call me to the lab.
>>
>> mahnaz
>>
>>
>
>
I am writing this from Bob's behalf ,  He will take about 40 ml of the 
P4330-RS resist  in the lab . He will use headway and will take the rest 
of the chemicals including the cyclotene family back to his lab.
Mary and I explained to him why we have eliminated  glycol ether from lab.

mahnaz



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