TiO2 coating in PQuest

Zhang, Zhiyu zhiyuz at slac.stanford.edu
Tue Mar 14 14:13:20 PST 2006

Hi, I am planning etching TiO2 thim film coating on Silicon using PQuest. The coating was conducted by Lance Goddard Associates. The sputtering target is TiO2 provided by Process Materials Inc. Please find attahced target spec sheet. Could you please let me know if I can use PQuest with this coating?  Thank you very much. 

Zhiyu ZHANG (Jack)
Stanford Linear Accelerator Center, M/S 26, Menlo Park, CA  94025
Tel:  650-861-7575 (M)  650-926-3202 (Office)
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