Prof. Saraswat and nitride?

Mary Tang mtang at
Wed Mar 15 09:26:06 PST 2006

Hi everyone --

I heard vague comments about a request from Krishna about running wafers 
with nitride...  Not that I really need to know the details if there was 
a quorum that approved this, but could we get the details of the 
request/what-was-done in writing for our Specmat records?  (i.e., where 
the film was from, cleans done here, process staff notified, equipment 
used, and post-equipment cleanup, if any, or any other considerations...)



Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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