Germanium Antimony Telluride

Aaron Matthew Gibby agibby at stanford.edu
Tue Oct 17 13:03:45 PDT 2006


Jim,

Thanks for the prompt reply.  I have edited the attached file to make my
request more clear.

Aaron

Quoting Jim McVittie <mcvittie at cis.Stanford.EDU>:

> Aaron,
>
> I suggest you give a more details about what you want to do. In
> particular, it would be useful to know how much material you want to
> remove and what pattern resolution you need. I believe you have info on
> both F and Cl based etching of this materail. I suspect you are thinking
> in terms of using the MRC or one of the Dryteks. If this is the case, you
> should say so.
>
> 	Thanks, Jim
>
> On Tue, 17 Oct 2006, Aaron Matthew Gibby wrote:
>
> > Dear Specmat Members,
> >
> > I would like to etch germanium antimony telluride in SNF.  Attached is
> my
> > detailed information.  Here are the URLs for the appropriate MSDSs:
> >
> >
>
http://www.alfa.com/CGI-BIN/LANSAWEB?WEBEVENT+L0C0022074AC90000B273052+ALF+ENG
> >
>
http://www.alfa.com/CGI-BIN/LANSAWEB?WEBEVENT+L0C00240F4D9985000D93061+ALF+ENG
> >
> > Feel free to contact me with any questions.
> >
> > Aaron
>
> --
> --------------------------------------------------------------
> Jim McVittie, Ph.D.    			Senior Research Scientist
> Allen Center for Integrated Systems     Electrical Engineering
> Stanford University             	jmcvittie at stanford.edu
> Rm. 336, 330 Serra Mall			Fax: (650) 723-4659
> Stanford, CA 94305-4075			Tel: (650) 725-3640
>
>
>


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