KOH decontamination and TylanPoly questions

Kevin Huang kevhuang at stanford.edu
Fri Oct 20 16:23:32 PDT 2006


Hi,
         I have two questions:
1)  Why is no matter allowed in the KOH decontamination process?  Is it
because KOH usually attacks metal?  What if the metals are capped by oxide,
will this be allowed to go through the decontamination procedure?

2) Tystar used to be a semi-clean poly deposition tool but I heard it's no
longer in the fab.  Can the tylanPoly tube take wafers with tungsten on them
or is there other metal-compatible poly deposition machine?

Thanks.

Kevin

-- 
==================================
Kevin Huang
Ph.D. Candidate
Stanford Organic Electronics Lab
Dept. of Electrical Engineering
Email: kevhuang at stanford.edu
Phone: (650) 725-6924
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