Bringing in Si and GaAs pieces in the lab.
Van Dorpe Pol
pvandorp at imec.be
Wed Oct 25 14:41:02 PDT 2006
I just had the general safety tour and the all-litho tour.
Coral login: vandorpe, phone number: 650 3915548
I am in stanford as a visiting scholar in the group of Mark Brongersma.
I have brought some samples with me from Imec, Belgium (www.imec.be),
that I would like to process in the SNF lab.
I have 4 kinds of samples:
1. one GaAs quarter: (an AlGaAs/GaAs heterostructure, covered with Al2O3
2. 6 pieces of Si/(thermally grown) SiO2, covered with a protective
layer of resist. These samples have been processed (i.e. grown and
diced) in the Imec clean room (the CMOS compatible production line)
3. 4 pieces of Si/SiO2/Al2O3, covered with a protective layer of resist.
These samples have also been processed (grown and diced) in the Imec
clean room: the SiO2 is thermally grown, while the Al2O3 (8A) is
deposited by atomic layer deposition. Everything also in the CMOS
compatible production line
4. 6 pieces of processed Si/SiO2/Au wafers. These contain Au and have
been processed in the III-V part of the Imec cleanroom
The processing that I want to do involve optical lithography, a wet
oxidation (LOCOS - with a Ge hard mask), e-beam lithography and Au
deposition (2 times)
Can I bring these pieces with me?
Pol Van Dorpe
Dr. ir. Pol Van Dorpe
Currently active in Stanford as a visiting scholar in the group of Prof.
Mark Brongersma (GLAM, Mat. Science & Eng. Dept.)
Phone: +32 16 28 10 26
Fax: +32 16 28 15 01
E-mail: Pol.Vandorpe at imec.be
IMEC vzw - Register of Legal Entities Leuven VAT BE 0425.260.668 -
Kapeldreef 75, B-3001 Leuven, Belgium - http://www.imec.be
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