Material request: ZnS

Ben Chui bwchui at gmail.com
Thu Sep 7 15:04:52 PDT 2006


Hello specmat committee,

     On behalf of A.M.Fitzgerald and Associates, I'd like to submit a
material request for ZnS.  This material will be deposited at an
external vendor and we'd like to bring it into SNF for dry etching
only.

     To our knowledge, this material has been used at the Univ of
Minnesota clean room for optical MEMS.

     Please advice us as to whether this material is allowed in SNF
and  if so in which machines.

Thanks,

Ben Chui



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