Material request: ZnS

Ben Chui bwchui at
Thu Sep 7 15:04:52 PDT 2006

Hello specmat committee,

     On behalf of A.M.Fitzgerald and Associates, I'd like to submit a
material request for ZnS.  This material will be deposited at an
external vendor and we'd like to bring it into SNF for dry etching

     To our knowledge, this material has been used at the Univ of
Minnesota clean room for optical MEMS.

     Please advice us as to whether this material is allowed in SNF
and  if so in which machines.


Ben Chui

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