Material request: ZnS

Jim McVittie mcvittie at cis.Stanford.EDU
Thu Sep 7 18:27:43 PDT 2006


Ben,

The students here work with films < 500 A thick. You will not be able to
sputter etch a 1 um thick ZnS in any of our tools. UCSB has a RIE tool
which is set up with the methane process. Our optics people here go there
for etching materials which need that process.

	Jim 

On Thu, 7 Sep 2006, Ben Chui wrote:

> Jim,
> 
>      We have to etch an optical stack which includes an alternating
> Ge/ZnS/Ge/ZnS.... structure (each layer on the order of 1 micron
> thick, i.e. the total stack will be multiple microns tall).  If we
> can't etch ZnS in-house, we might have to send it outside, or it might
> be easier anyway to do a thick liftoff process to avoid dry-etching
> altogether (since a dry-etch would involve continually switching
> between Ge etch and ZnS etch).  What do you recommend?
> 
> Ben
> 
> 
> On 07/09/06, Jim McVittie <mcvittie at cis.stanford.edu> wrote:
> > Ben,
> >
> > Some of the students already work with ZnCdS, so ZnS is not new to the
> > lab. I think they have done some sputter etching of their material in the
> > MRC. I will have to check on this point.  What materials do you want to
> > etch? To plasma etch ZnS, you need a CH4/H2/Ar process, which we do not
> > have.
> >
> >        Jim
> >
> > On Thu, 7 Sep 2006, Ben Chui wrote:
> >
> > > Hello specmat committee,
> > >
> > >      On behalf of A.M.Fitzgerald and Associates, I'd like to submit a
> > > material request for ZnS.  This material will be deposited at an
> > > external vendor and we'd like to bring it into SNF for dry etching
> > > only.
> > >
> > >      To our knowledge, this material has been used at the Univ of
> > > Minnesota clean room for optical MEMS.
> > >
> > >      Please advice us as to whether this material is allowed in SNF
> > > and  if so in which machines.
> > >
> > > Thanks,
> > >
> > > Ben Chui
> > >
> >
> > --
> > --------------------------------------------------------------
> > Jim McVittie, Ph.D.                     Senior Research Scientist
> > Allen Center for Integrated Systems     Electrical Engineering
> > Stanford University                     jmcvittie at stanford.edu
> > Rm. 336, 330 Serra Mall                 Fax: (650) 723-4659
> > Stanford, CA 94305-4075                 Tel: (650) 725-3640
> >
> >
> >
> 

-- 
--------------------------------------------------------------
Jim McVittie, Ph.D.    			Senior Research Scientist 
Allen Center for Integrated Systems     Electrical Engineering
Stanford University             	jmcvittie at stanford.edu
Rm. 336, 330 Serra Mall			Fax: (650) 723-4659
Stanford, CA 94305-4075			Tel: (650) 725-3640





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