Deposit ITO (indium doped tin oxide) with Metalica.
mihuhou at stanford.edu
Fri Sep 8 13:28:50 PDT 2006
To whom it may concern,
I would like to request the approval to use ITO (indium doped tin oxide)
target in Metalica in the snf clean room. I've talked to Jim McVittie and
Jeannie Perez both of whom agreed that the process is feasible and will
need only the approval from SpecMat.
Thanks a lot!
EE PhD Candidate
Professor Nishi's Group
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