Deposit ITO (indium doped tin oxide) with Metalica.

Ying Chen mihuhou at stanford.edu
Fri Sep 8 13:28:50 PDT 2006


To whom it may concern,

I would like to request the approval to use ITO (indium doped tin oxide)
target in Metalica in the snf clean room. I've talked to Jim McVittie and
Jeannie Perez both of whom agreed that the process is feasible and will
need only the approval from SpecMat.

Thanks a lot!

Best regards,

Ying Chen
EE PhD Candidate
Professor Nishi's Group





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