SpecMat logsheet Sept. 12, 2006
Jim McVittie
mcvittie at cis.Stanford.EDU
Mon Sep 11 13:31:16 PDT 2006
Ed,
Regarding Zn, I believe pure Zn has been sputtered in Metallica a few
years back by Michael Wiemer and Rafael Aldaz. I think Simon Wong's
students have sputter etched ZnCdS in the MRC. As for Tylan #4, I believe
Simon's ZnCdS students are using a furnace over in Paul McIntyre's area.
Simon's students sometimes report processing details at the NVM mtgs,
which I attend.
Jim
On Mon, 11 Sep 2006, Ed Myers wrote:
> SpecMat Members,
>
> The agenda for this week is very light. It should be a quick meeting.
>
> I believe we have some pretty good agreement on most of the
> items. The one I'm worried about is processing of ZnS. Both of
> these elements are fall below the indium vapor pressure cut off. We
> have approved ZnCdS deposition in the metallica, but with
> restrictions. I have not logged any allowed Zn alloy processing in
> any other pieces of equipment. We did have a complaint from a user
> who detected large quantities of Zn after processing in Tylan 4.
>
> Ed
--
--------------------------------------------------------------
Jim McVittie, Ph.D. Senior Research Scientist
Allen Center for Integrated Systems Electrical Engineering
Stanford University jmcvittie at stanford.edu
Rm. 336, 330 Serra Mall Fax: (650) 723-4659
Stanford, CA 94305-4075 Tel: (650) 725-3640
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