SpecMat logsheet Sept. 12, 2006

Mary Tang mtang at stanford.edu
Mon Sep 11 14:36:55 PDT 2006

Hi everyone --

I had understood that Jim arranged for Mike/Rafael (Zn/Au?) and Zheng 
(ZnCdS/ZnCdSe) have their own metalica inserts/spare parts, in order to 
minimize possible cross-contamination.  They were also trained to 
install and replace these parts...  Whatever is decided, we should be 
consistent in administering the policy.  If we OK ZnS, we should be 
consistent with previous practice, unless we decide that it is no longer 
a good method for controlling contamination. 

I take it, then, that materials containing Zn were never approved for 
processing in tylan4?  And I'd like to double-check with everyone else 
-- is our policy on tylans3 and 4 still to have everything SpecMat 
approved on a case-by-case basis (or am I behind the times)?


Jim McVittie wrote:

>Regarding Zn, I believe pure Zn has been sputtered in Metallica a few
>years back by Michael Wiemer and Rafael Aldaz. I think Simon Wong's
>students have sputter etched ZnCdS in the MRC. As for Tylan #4, I believe
>Simon's ZnCdS students are using a furnace over in Paul McIntyre's area.
>Simon's students sometimes report processing details at the NVM mtgs,
>which I attend.
>	Jim 
>On Mon, 11 Sep 2006, Ed Myers wrote:
>>SpecMat Members,
>>The agenda for this week is very light.  It should be a quick meeting.
>>I believe we have some pretty good agreement on most of the 
>>items.  The one I'm worried about is processing of ZnS.  Both of 
>>these elements are fall below the indium vapor pressure cut off.  We 
>>have approved ZnCdS deposition in the metallica, but with 
>>restrictions.  I have not logged any allowed Zn alloy processing in 
>>any other pieces of equipment.  We did have a complaint from a user 
>>who detected large quantities of Zn after processing in Tylan 4.

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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