Material request: ZnS

Ben Chui bwchui at gmail.com
Tue Sep 12 16:01:38 PDT 2006


Ed,

   OK, thanks,

Ben


On 12/09/06, Ed Myers <edmyers at stanford.edu> wrote:
> Ben,
>
> Both Zn and S are below our nominal vapor pressure cut off for vacuum
> equipment or elevated temperature processing.  Yes, there is some
> ZnCdS work going on, but it is regulated, only for limited work and
> not given a free pass through the fab.  There is not a problem with
> brining the material in to the fab for metrology on gold contaminated
> equipment.
>
> The viability comment related to the doing the etch you requested.
>
> Ed
>
>
> At 03:37 PM 9/12/2006, Ben Chui wrote:
> >Ed,
> >
> >     Can you clarify what is not viable at SNF?  Bringing in
> >externally-deposited ZnS films into the lab?  Or dry-etching it
> >in-house?  Assuming we can get the films etched elsewhere, we'd still
> >like the ability to bring the films in-house for inspection.  From
> >Jim's earlier replies, it seems like ZnCdS is already allowed in the
> >lab, so I presume that's no problem?
> >
> >Thanks,
> >
> >Ben
> >
> >
> >On 12/09/06, Ed Myers <edmyers at stanford.edu> wrote:
> >>Ben,
> >>
> >>SpecMat has reviewed your request, and do not think your process is
> >>viable at SNF.  We would like to work through the NNIN remote
> >>processing community on your behalf if you are interested.  We will
> >>be happy to fill out the required paperwork.  Please let me know how
> >>you would like to proceed.
> >>
> >>Regards,
> >>
> >>
> >>At 03:04 PM 9/7/2006, you wrote:
> >> >Hello specmat committee,
> >> >
> >> >     On behalf of A.M.Fitzgerald and Associates, I'd like to submit a
> >> >material request for ZnS.  This material will be deposited at an
> >> >external vendor and we'd like to bring it into SNF for dry etching
> >> >only.
> >> >
> >> >     To our knowledge, this material has been used at the Univ of
> >> >Minnesota clean room for optical MEMS.
> >> >
> >> >     Please advice us as to whether this material is allowed in SNF
> >> >and  if so in which machines.
> >> >
> >> >Thanks,
> >> >
> >> >Ben Chui
> >>
> >>
> >>
>
>
>
>



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