GaN as a clean material?

Mary Tang mtang at
Wed Aug 1 15:43:27 PDT 2007

Hi all --

Three engineers from Alpha & Omega Semiconductor would like to join the 
lab.  They would like to use silicon substrates with a thin layer (3-5 
microns) of GaN in clean tools in the lab (stsetch and epi).  I believe 
they plan to get these substrates from Honeywell.  What do you all think?


Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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