GaN as a clean material?

Mary Tang mtang at stanford.edu
Wed Aug 1 15:43:27 PDT 2007


Hi all --

Three engineers from Alpha & Omega Semiconductor would like to join the 
lab.  They would like to use silicon substrates with a thin layer (3-5 
microns) of GaN in clean tools in the lab (stsetch and epi).  I believe 
they plan to get these substrates from Honeywell.  What do you all think?

Mary

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu





More information about the specmat mailing list