PDMS in Innotec
jkoma at stanford.edu
Tue Aug 7 13:51:14 PDT 2007
I need to deposit metal on PDMS (polydimethylsiloxane). The PDMS layer
is deposited on gold-coated Si wafers in the MERL clean shop and will be
transported to SNF in wafer cases wrapped in foil and in a ziploc bag.
Is it acceptable to use Innotec for this? I am not trained on the other
metallization tools in the SNF. The deposition can be masked by either a
kapton shadow mask or stainless steel shadow mask.
More information about the specmat