PDMS in Innotec

Jason Komadina jkoma at stanford.edu
Tue Aug 7 13:51:14 PDT 2007

I need to deposit metal on PDMS (polydimethylsiloxane). The PDMS layer 
is deposited on gold-coated Si wafers in the MERL clean shop and will be 
transported to SNF in wafer cases wrapped in foil and in a ziploc bag. 
Is it acceptable to use Innotec for this? I am not trained on the other 
metallization tools in the SNF. The deposition can be masked by either a 
kapton shadow mask or stainless steel shadow mask.

Jason Komadina

More information about the specmat mailing list