PECVD Process Change Request

Ron Kuse rkuse at pacificbiosciences.com
Mon Aug 27 15:44:12 PDT 2007


I would like to change the temperature of PECVD STS tool from 350 deg. C
to 300, 250, and 200 to investigate effect on pinhole formation when
deposited on 100nm Al film.  At 350 deg. C, a large number of pinholes
form.  Images are available upon request but will not be emailed as they
include proprietary design information.  Thank you.

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