Cleanliness Requirements for
AFischer-Colbrie at nanosysinc.com
Tue Dec 11 12:32:27 PST 2007
Hello Specmat Committee,
I would be interested in exploring use of an N2O RTP tool for some
non-standard samples. It appears that none of the contaminated tools
have that capability but one of the semi-clean tools does.
Can you please forward me the name of someone on the committee with whom
I could discuss this ahead of time? We have some cleanliness data but
specific criteria would be most helpful.
I sent some preliminary info to Mary Tang a couple of weeks ago but I am
guessing that she must be out of town.
Is there a primary contact for the committee?
Please let me know.
Alice Fischer-Colbrie, Ph.D.
2625 Hanover St.
Palo Alto, CA 94304
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