Fu, Kai-Mei kai-mei.fu at
Thu Dec 13 15:25:26 PST 2007


I would like to dry etch GaP at SNF but did not see this on the common material list.  Below is the relavent information

1)      Kai-Mei Fu
        HP labs

2) GaP, Gallium Phosphide (solid) MSDS attached

3) IQE is the company that grew it.

4) We are making GaP microstructures and don't have another way to dry etch them.

5) If approved for the pquest (am checking with Mary) my process flow would only use this machine.

6) small 1cm x 1cm wafers at a time.

7) will not be stored at SNF.


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