plasma ashing of plastic

Jason Fu Jfu at
Tue Feb 13 14:22:47 PST 2007

Thanks a lot for the prompt response. Please do let me know if there is
a better solution.

-----Original Message-----
From: Mary Tang [mailto:mtang at] 
Sent: Tuesday, February 13, 2007 1:33 PM
To: Jason Fu
Cc: jperez at; mtang at;
specmat at
Subject: Re: plasma ashing of plastic

Hi Jason --

I'm forwarding your request to SpecMat, just to be sure.  I'm sure
someone else has tried to clean packaged parts, but am not sure drytek4
is the best option...



Jason Fu wrote:
> Hi, Jeannie,
> I have a partially packaged (partially decapsulated) chip with some 
> molding material (glass filler epoxy) debris on the top of the chip.
> I am wondering if I am allowed to use Dretek 4 for plasma ashing and 
> clean the chip surface.
> Thanks,
> Jason
> Junxian (Jason) Fu, PhD
> Senior Engineer, Electrical and Semiconductors Practice Exponent 
> Failure Analysis Associates, Inc.
> 149 Commonwealth Drive
> Menlo Park, CA 94025
> jfu at <mailto:jfu at>
> (Office) 650-688-6911
> (Mobile) 650-305-9140
> CONFIDENTIALITY NOTICE: This e-mail transmission (and the attachments 
> accompanying it) may contain confidential information belonging to the

> sender which is protected by the attorney-client privilege. The 
> information is intended only for the use of the intended recipient. If

> you are not the intended recipient, you are hereby notified that any 
> disclosure, copying, distribution or the taking of any action in 
> reliance on the contents of this information is strictly prohibited.
> Any unauthorized interception of this transmission is illegal under 
> the law. If you have received this transmission in error, please 
> promptly notify the sender by reply e-mail, and then destroy all 
> copies of the transmission.

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

More information about the specmat mailing list