Fusion contamination classification

Paul Rissman rissman at stanford.edu
Mon Jan 8 11:19:18 PST 2007

Hi All,

We need to create a classification for the Fusion tool.  Since it is 
in the lithography area and the temperature on the system will be a 
maximum of 200 degrees, should it be considered un-classed as with 
other litho tools?  It could potentially be used for cure for front 
end implants.  Other likely uses are for harsh etches, e.g. stsetch.


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