Paul Rissman rissman at stanford.edu
Fri Jan 19 14:35:01 PST 2007

Item 235: Clean classification for the Fusion tool.
Recommendation: Use the Litho, All classification.

Mary wanted a post svg develop track rinse.  The thought is that 
there maybe backside contamination which would transfer via the system chuck.

I will require this in the future if all agree, although I need to 
know which wet bench.

More information about the specmat mailing list