Material approval

Paul Park yspark at
Fri Jul 6 16:13:15 PDT 2007

I need to deposite Ga, In, Sn stack film on nitride film on silicon wafer.   Can I do that with e-beam evaporator?   If approved, I will buy crucible and pallet.
The wafer will be allealed at fga2 (gaas23) and will not return to the other equipment.
Paul (yspark)

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