Scale for semi clean

Shen Ren renshen at
Fri Jul 20 16:48:07 PDT 2007

Dear Committee members,

I am wondering if it is possible to have a wafer scale (similar to what we
are having now) for semi clean group. Right now, the one in the fab is
termed "clean". But what it really is? People do their measurement on this
tool before they put into wbdiff. I think that it make more sense to have a
semi-clean scale. Does this make sense to you? Thanks.

Best wishes,

Shen Ren

Department of Electrical Engineering
Stanford University
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