BCB (1st part)

mgobet at stanford.edu mgobet at stanford.edu
Wed Jun 6 14:51:47 PDT 2007

----- Message transféré de mgobet at stanford.edu -----
     Date : Wed, 30 May 2007 09:14:11 -0700
      De : mgobet at stanford.edu
Répondre à : mgobet at stanford.edu
  Objet : Re: Sharing costs of BCB
       À : Ed Myers <edmyers at stanford.edu>
      Cc : deji at snf.stanford.edu


Thank you very much for your e-mail. Yes, we are planning to bring BCB
(Cyclotene 3022-57), adhesion promoter AP3000 and Primary Stripper A
from Dow CHemicals. I e-mailed Dow to request the MSDS and will
forward their e-mail to you as soon as I get it.

Process flow:
- spin AP3000, BCB on headway
- softbake
- cure in bluem
- use of PR or SiO2/SiNx as mask (mask is of course patterned using
optical lithography)
- etch of BCB in O2/CF4 plasma (either Drytek4 or PQuest after 21st of
each month for GaAs users)

Please let me know if you need any additional information.
THanks again.

Quoting Ed Myers <edmyers at stanford.edu>:

> Mathilde and Deji,
> Are you planning on using the BCB in the SNF facility?  If so, we need
> the MSDS and an understanding of your proposed process flow.  BCB has
> been used, but it is a regulated material and it must be semiconductor
> grade.
> Regards,
> Ed
> At 02:10 PM 5/29/2007, you wrote:
>> Hello,
>> I am about to order BCB, Cyclotene 3022-57, together with another
>> labmember, Deji. We are wondering if somebody else is interested in
>> buying this product with us to further split the costs. The order is
>> for 1 liter bottle, which is a large quantity as we only need a few
>> droplets per wafer. As you may know, BCB is very expensive, so this
>> may be a very good opportunity to get some at a cheaper price.
>> Please let us know by tomorrow if you are interested. Thanks.
>> Best,
>> Mathilde

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