Mary Tang mtang at
Wed Mar 14 11:19:16 PDT 2007

Hi Colin --

You know, I'm not sure.  There any many BARC's approved, but I don't 
off-hand recall one from Brewer....  So, if you don't mind, let's 
consider this a SpecMat request.  You've already provided an 
applications guide and MSDS.  Could you please provide some additional 
information about where (which equipment, which wet benches/ovens/hot 
plates) and how (namely, what waste is anticipated and where is it 
going) you plan to use this?  Yes, we have a freezer/refrigerator in the 
lab (behind the implant area) where flammable-compatible chemicals are 
stored.  To store a chemical there, you'll need to get a yellow label 
and a barcode from Mahnaz or Ed.

By the way, I take it this is for your resist lifting-on-PDMS problem?  
(Cool!  Any idea what the basic chemistry of the "polymer solids" is?)



Colin Reese wrote:
> Mary,
> Can you tell me if the Brewer Science Wide8B BARC has been approved 
> for use in SNF yet? I have attached the specs and the MSDS. It 
> contains NMP, cyclohexanone, tetrahydrofurfuryl alcohol, and a few 
> proprietary ingredients. Looks like good stuff. Develops with standard 
> developer and is compatible with liftoff. I got a free 60mL sample in 
> the mail today.
> Also -- is there a chemical freezer in SNF?
> Thanks,
> Colin
> -- 
> Dear Colin,
> Thank you for your interest in Brewer Science materials.  I have 
> attached a
> copy of the data sheets for all 3 of our i-line materials.  As you 
> will see
> we have 2 dry etch and 1 wet etch material.  Please feel free to 
> contact me
> should you have any further questions or need any more information.
> I look forward to hearing from you.
> Kind regards,

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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