Request To Bring A Silane To SNF
mtang at stanford.edu
Thu May 3 17:23:04 PDT 2007
Hi Claudia --
This chemical (or very similar compound) has been OKed to use in the lab
with certain caveats. But, I have a number of questions (and maybe the
other SpecMat'ers may have more):
- Will you be storing the chemical here?
- I would strongly suggest that you use your own dedicated labware for this.
- Is there any reason this needs to be done in the litho area? If not,
wbsolvent would be a better place (surface modification processing is
generally a bad idea in the litho area - cross-contamination, such as
with used glassware, can drastically affect surface properties of other
- If you are using IPA, dispose of waste in the solvent carboy. If you
are using water, please process at wbgeneral and aspirate waste or
- What kind of processing in the lab will be done subsequent to your
surface modification and where?
Claudia Richter wrote:
> Dear Specmat Committee,
> I’d like to request to bring in to SNF
> 3-aminopropyldimethylethoxysilane. The amine part of this silane is
> important for further derivatization of the surface of our substrates.
> The process plan is to use this silane to coat silicon wafers (with
> oxide). This silane is diluted down to a solution that is 1% in
> isopropanol (99.98%) or DI water. The solution poured into a
> dish/beaker large enough to accommodate the wafers. The wafers are
> dipped in this solution and rinsed with isopropanol and water; then
> dried with an air gun. The proposed plan is to do this in the solvent
> bench in the lithography room and use the existing carboy that is
> provided to collect the waste or have our own waste bottle to collect
> this waste.
> Attached is the MSDS sheet. We would like to begin this process within
> the next week. Please contact me for any questions or further information.
> Claudia M. Richter
> Sr. Process Engineer
> Complete Genomics
> 750 N. Pastoria Ave.
> Sunnyvale, CA. 94085
> P: 408.730.5700
> F: 408.769.2258
> www.completegenomics.com <http://www.completegenomics.com>
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA 94305
mtang at stanford.edu
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