[Fwd: Re: Lampoly]

Jim McVittie mcvittie at cis.Stanford.EDU
Wed May 9 15:36:06 PDT 2007


Since they want to go 2 um deep, I would have probably suggested using 
the P5000. Which tool to use actually depends on the structure they 
want. I think the P5000 HBr/NF3 process tends to be better for deeper 
structures. As for metal contamination, what is proposed is probably ok.


On Wed, 9 May 2007, Mary Tang wrote:

> Hi all --
> What do you think?  I take it that Pt is needed as a conductive layer 
> for FIB.  It seems to me that if it is stripped and decontaminated as 
> per standard procedures (5:1:1 H2O:HCl:H2O2, followed by wbnonmetal, 
> followed by wbdiff clean) this should be OK for lampoly.
> Mary

Jim McVittie, Ph.D.    			Senior Research Scientist 
Allen Center for Integrated Systems     Electrical Engineering
Stanford University             	jmcvittie at stanford.edu
Rm. 336, 330 Serra Mall			Fax: (650) 723-4659
Stanford, CA 94305-4075			Tel: (650) 725-3640

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