HBr?

Mary Tang mtang at stanford.edu
Wed May 9 16:07:36 PDT 2007


Hi --

Does anyone happen to have John Choi's procedure for mixing HBr etchant 
for anisotropic etching of InP or GaAs?  As I recall, it was very 
detailed and he had worked with a chemist to ensure that no Br2 would be 
generated...  (Angie Lin from the Harris lab wants to do this -- her 
protocol is very vague -- she plans to do this in the Harris lab, not SNF.)

Mary

-- 
Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
(650)723-9980
mtang at stanford.edu
http://snf.stanford.edu





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