Request for New Negative photoresist
artyjamo at comcast.net
artyjamo at comcast.net
Fri May 18 11:19:24 PDT 2007
Hello Spec-Mat Committee,
I would like to bring in a new negative photoresist made by Micro Chem
called KMPR.
This is a high viscosity positive photoresist for 15-80 um thick
coatings. I would
like to bring in an 8oz bottle (like those that are issued in the
SNF stockroom) and keep it in the small flammables
cabinet, along with the other SNF members resist samples. I would be
using these resists to coat my substrates on the Headway spinner (15
to 80 um thick) and softbaking them on the hotplates that are immediately to
the right of the Headway spinner. I would like to expose the coated
substrates on the Karl Suss aligners, and develop the patterns in LDD-26W
at the develop bench in the litho area. Used developer would go down
the drain in the develop bench. Any waste of these resists would be put
in the solvent waste carboy in the Solvent bench. Any clean
roomwipes contaminated with this resist, empty bottles with resist
resid ues would be bagged and put in the solid chemical waste bin in
the Litho area.
I am attaching a soft copy of the MSDS sheet
Please let me know ASAP if I can bring this sample in for use.
> Much Thanks,
>
> Aleta Jamora (ajamo)
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