Electronic MSDS for polyimide and adhesion promoter

Mary Tang mtang at stanford.edu
Fri Nov 9 11:11:04 PST 2007

These should be OK for use in the lab, with the usual resist chemical 
handling precautions.  The polyimide uses the standard NMP solvent (they 
mispelled it on the MSDS, but the CAS number matches.)  The adhesion 
promoter is primarily based on PGME, which is considered to be not one 
of the bad ethyl ethers.


Matthew Buynoski wrote:
> These are the MSDS provided by the vendor (HD Microsystems) for polyimide
> PI-2610 and adhesion promoter VM-652 that we (Nanosys) are proposing to use
> in the SNF. 

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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