Request from Nanosys

Mary Tang mtang at
Fri Nov 9 15:02:21 PST 2007

Matthew Buynoski from Nanosys is working with Josephine Suarez and Eric 
P on a new process flow.  One of the odd things he is asking for is to 
put a few thousand angstroms of  STS PECVD oxide on 1-2 microns of 
polyimide that has been cured at 350 C or higher.  Does anyone 
anticipate a problem with this?


Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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