chemical approval

Mary Tang mtang at
Wed Nov 14 14:19:15 PST 2007

Hi Elizabeth --

In principle, most of these are similar to what has been previously 
approved.  But there are a few more questions...  Would you happen to 
know what the VM-651 is?  The MSDS does not really say nor does it give 
exposure limits.  Is the VM-651 the "concentrated" version of the 
VM-652?  If so, then I think it's OK (as I understand it, the 
proprietary ingredient in VM-652 is aminopropyl trimethoxysilane or 
something similar -- if you could check with HD Micro, it would be helpful.)

How do you plan to use the polyimide?  (Did I send you a generic process 
flow?)  By the way, isn't the PI2610 supposed to be self-priming -- is 
adhesion promoter needed for this? 


Elizabeth Edwards wrote:
> Hi,
> I don't know who to send these MSDS forms to for approval. I would
> like to purchase at least the PI-2610 to use in the Stanford
> NanoFacility (in CIS). If you are the right person - can you please
> let me know which of these chemicals (I've attached the MSDS sheets) I
> can purchase?
> Thanks,
> Liz
> ---------- Forwarded message ----------
> From: Elizabeth Edwards <ehe at>
> Date: Nov 5, 2007 3:32 PM
> Subject: HD Microsystems polyimide MSDS
> To: Mary Tang <mtang at>
> Hi Mary,
> I wanted to check with you before purchasing these 4 chemicals that
> they are permitted inside SNF.
> MSDS attached for HD Microsystems products:
> PI-2610 polyimide
> T-9039 polyimide thinner
> VM-651 and VM-652 (one is concentrated) adhesion promoters
> -Liz

Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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