Gold in rtagaas

Mary Tang mtang at
Tue Nov 20 14:03:44 PST 2007

Hi all --

Jia Zhu would like to anneal gold contacts in rtagaas on silicon 
substrates that have Ge and/or SiGe nanowires.  What's allowed in rtagaas?


Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at

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