[Fwd: Can we run our Au-etched wafers through semi-clean RTP?]

Mary Tang mtang at stanford.edu
Wed Nov 28 09:48:04 PST 2007

Hi all --

Please expect a request from Alice for this. Some additional info.

- The Au was used as catalyst for nanowire growth.  It was "removed" 
using wet etch.  This will be confirmed using TXRF.
- Alice wants to use the semiclean RTA because they need N2O ambient for 
their anneal.

We often get requests for processing substrates on which nanowires have 
been grown from metal catalysts -- it would be good to come up with a 
criterion or methodology for determining cleanliness levels, don't you 


Mary X. Tang, Ph.D.
Stanford Nanofabrication Facility
CIS Room 136, Mail Code 4070
Stanford, CA  94305
mtang at stanford.edu

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