AMAT DPS Etcher

Christopher Detrick chris.detrick at global-fab.com
Wed Oct 17 00:17:48 PDT 2007


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Global Fab Surplus
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October 16, 2007
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Greetings!
Global Fab Surplus has an AMAT DPS etcher and two Disco DFG 840 grinders available
for imediate sale. These are in addition to the equipment on our previous email 
sent yesterday. Below are the specs for the DPS etcher. This tool is in excellent
condition and is being maintained by Applied Materials under a service contract.
 If you are interested in this system please contact us right away. These are priced
to sell quickly.

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AMAT Centura DPS Etcher

Process Metal Etch Process
Software Version E4.3
System Power Rating 208VAC 3Phase 4W
Loading Configuration 2 loaders config
Equipment manuals available? Yes
Tool under OEM service contract? Yes
Description Chemicals / Gases Used Photo Attached
Chm Position 1 Etch Chamber A CL2, BCL3, CF4, N2,
Ar, CHF3, NF3, O2
Chm Position 2 Etch Chamber B CL2, BCL3, CF4, N2,
Ar, CHF3, NF3, O2
Chm Position 3 Strip Chamber C NH3, CF4, N2, O2
Chm Position 4 Strip Chamber D NH3, CF4, N2, O2
Chm Position ___ Orienter Chamber F N2
Chm Position ___ Cooldown Chamber E N2

PLATFORM
TYPE
1 Etch 5200 Legacy Centura 1
Common Mainframe

CHAMBER
POSTION 'A'
2 Metal A1, DPS R1 1
includes ESC, heated turbo pump and foreline and 6 gas
lines default.
includes Vpp and Tc monitoring at the wafer and dome
lift.

CHAMBER
POSTION 'B' 1
3 Metal A1, DPS R1
includes ESC, heated turbo pump and foreline and 6 gas
lines default.
includes Vpp and Tc monitoring at the wafer and dome
lift.

CHAMBER
POSTION 'C'
6 ASP+ 1
Includes chuck type process kit for improved thermal
stability

CHAMBER
POSTION 'D'
7 ASP+ 1

CHAMBER
POSTION 'E'
8 Cooldown Chamber 1

CHAMBER
POSTION 'F'
9 (OA) Orienter Chamber 1

Wafer
Orienter chamber postion F

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Thank you for taking the time to read our email. Please feel free to forward the
 email to anyone who may be interested any of these tools.

Sincerely,

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Chris Detrick (California)
805-215-9188
chris.detrick at global-fab.com
David Lee (Colorado)
719-686-0128
support at global-fab.com
Global Fab Surplus


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Global Fab Surplus | 195 Kirkstone Lane | Colorado Springs | CO | 80906
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